| title: | Point defects identification in the Si-SiO2 system and investigation of it influence on the system properties... |
|---|---|
| reg no: | ETF4970 |
| project type: | Estonian Science Foundation research grant |
| subject: |
1.3. Physics 2.2. Materials Science |
| status: | completed |
| institution: | Estonian Maritime Academy |
| head of project: | Daniel Kropman |
| duration: | 01.01.2002 - 31.12.2003 |
| description: | Investigation of the point defects and its interaction in the Si-SiO2 system. Determination of their nature. Examination of their influence on the properties of the system. On this basis, improvement of the technology of the Si-SiO2 system fabrication. Assumed results : increase of the stability of the parameters of integrated circuit elements. |
| project group | ||||
|---|---|---|---|---|
| no | name | institution | position | |
| 1. | Daniel Kropman | Estonian Maritime Academy | Dotsent | |
| 2. | Viido Paomets | Tondi Electronics | Chief engineer | |
| 3. | Jaan Raudoja | Technical University | Sen.researcher | |