| title: | Point defects identification in the Si-SiO2 system and investigation of it influence on the system properties. |
|---|---|
| reg no: | ETF5727 |
| project type: | Estonian Science Foundation research grant |
| subject: |
1.3. Physics 2.2. Materials Science |
| status: | accepted |
| institution: | Estonian Maritime Academy |
| head of project: | Daniel Kropman |
| duration: | 01.01.2004 - 31.12.2006 |
| description: | Investigation of the point defects in the Si-SiO2 system.Determination of their nature.Examination of their influence on the properties of the Si-SiO2 system.Improoving of the tecnology of Si-SiO2 system fabrication.Assumed results.increase of the reliability of the parameters of integrated circuit elements.... |
| project group | ||||
|---|---|---|---|---|
| no | name | institution | position | |
| 1. | Marit Kauk | Tallinna Tehnikaülikool | teadur | |
| 2. | Daniel Kropman | Estonian Maritime Academy | Dotsent | |
| 3. | Viido Paomets | Tondi Elektroonika AS | peainsener | |